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Drucksensor Ausgewählte Artikel

Drucksensor Ausgewählte Artikel

  • Kapitel 1
  • Was ist ein Drucksensor? 
 

 

 
 

1. Umriss

 

 

 
 

Ein Drucksensor ist ein Gerät, das den Druck einer Flüssigkeit wie eines Gases oder einer Flüssigkeit in ein elektrisches Signal umwandelt.

Drucksensoren
Grob gesagt werden die Drucksensor-Referenzen in die folgenden drei Typen unterteilt.
a. Anzeigeinstrument (= Gauge) 
[basierend auf “atmosphärischem Druck”]
b. Absolut 
[basierend auf “absolutem Vakuum”]
c. Differenziell 
[Messt die Differenz zwischen zwei Drücken.]

 

 

2. Funktionsprinzipien

 

 

 
 

Ein Drucksensor verwendet im Allgemeinen einen Zwerchfell, auf dem Dehnungsmessstreifen gebildet sind, und misst seine Dehnung (oder Durchbiegung) aufgrund der aufgebrachten Kraft über den Zwerchfell-Bereich.

Unser Unternehmen, NIDEC COMPONENTS EUROPE GmbH, bietet zwei Arten von Drucksensoren als Messverfahren an: ein Verfahren mit einem Diffusionshalbleiter (Silikon-MEMS) und ein Verfahren mit einem Dünnschichtmessgerät mit SUS-Membran. Jeder Typ hat seine eigenen Eigenschaften, und wir verfügen über eine Vielzahl von Drucksensorprodukten, indem wir diese beiden Methoden entsprechend der Anwendung und den Marktanforderungen richtig anwenden.

Schauen wir uns das Funktionsprinzip für jeden Typ genauer an.

 
Ⅰ. Silikon-MEMS (Si-MEMS)
SI-MEMS-Sensorchips
 
Bild des SI-MEMS-Sensorchips
 
Querschnittszeichnung des Si-MEMS Zwerchfell
Si-MEMS Zwerchfell
Querschnittszeichnung
Das Si-MEMS nutzt den piezoresistiven Effekt, bei dem der spezifische elektrische Widerstand abhängig von der Belastung der Widerstände variiert. Ein Sensorchip besteht aus einkristallinem Silizium. Die Chipstruktur ermöglicht es dem Zwerchfell, sich zu verformen, sobald der Chip Druck erhält.

Die vier Dehnungswiderstände, die wie in der Abbildung unten gezeigt angeschlossen sind, bilden eine Wheatstone-Brückenschaltung. Diese Brückenschaltung wird mit konstantem Strom (nominell 1,5 mA DC) betrieben. Bei Druckbeaufschlagung erhöhen sich die Widerstandswerte von R2/R3, während die von R1/R4 abnehmen, was zu einer Ungleichheit in der Brückenschaltung und einer Spannungsdifferenz am Ausgangsende führt. Diese Spannungsdifferenz wird zu einer dem Druck proportionalen Ausgangsspannung. Auch beim Anlegen von Unterdruck werden die Polaritäten ebenfalls in die gleiche Orientierung wie bei Anlegen eines Überdrucks umgekehrt.

Zur Erläuterung der Druck- und Leistungskennlinie ist die Verformung des Zwerchfells in der rechtenim weiter oben stehenden Zwerchfell-Querschnittszeichnung vergrößert dargestellt, wobei der Verformungsgrad jedoch nur wenige Mikrometer beträgt. Daher ist die mechanische Verformung des Zwerchfells optisch kaum zu erkennen.

  • DMS-Muster_Si-MEMS
  • Wheatstone-Brückenschaltung_Si-MEMS
 
Ⅱ. Dünne-Schichten-Sensor (mit SUS-Zwerchfell)
 
Querschnittszeichnung des SUS-Dünne-Schichten-Sensorchips
 
Cross-section of thin film sensor
Dünne-Schichten-Sensor
Querschnittszeichnung
Ⅱ. Dünne-Schichten-Sensor (mit SUS-Zwerchfell)
Ein Dünne-Schichten-Sensor wird durch Ausbilden eines Dünne-Schichten-Meßstreifens auf einem metallischen SUS-Zwerchfell über einen Isolierfilm strukturiert. Bei Druckbeaufschlagung verformt sich das SUS-Zwerchfell und das auf dem Zwerchfell gebildete Messgerät Dünne Schichten verformt sich, das dann Änderungen des Widerstandswertes des Messgeräts erkennt.

In einem Dünne-Schichten-Sensor, wie bei Si-MEMS, sind vier Dünne-Schichten-Widerstände verbunden, wie im folgenden Schema gezeigt, um eine Wheatstone-Brückenschaltung zu bilden. Die Dünne Schichten Messwiderstände werden mit konstanter Spannung angesteuert. Der SUS-Zwerchfell verformt sich bei Druckeinwirkung, die auf dem Zwerchfell gebildeten Dünne Schichten Widerstände verformen sich, die dann jede Änderung des Widerstandswertes des Messgerätes erkennen. Somit kann ein Spannungssignal proportional zum Druck erhalten werden.

  • Wheatstone-Brückenschaltung_SUS-Dünne-Schichten-Sensor
 
  • Kapitel 2
  • Einführung unserer Drucksensoren
 

 

 
 

1. Meilensteine

 

 

 
 

Wir liefern seit etwa 40 Jahren Drucksensoren, beginnend mit der Herstellung und dem Vertrieb von Drucksensoren für elektronische Blutdruckmessgeräte im Jahr 1980. Dank Ihnen werden unsere Drucksensoren in verschiedenen Branchen wie Halbleiterfertigungsanlagen, Industrieanlagen, Medizinische Ausrüstung, Analysator, Messinstrument und hydraulische Geräte wie Bearbeitungszentren.

  • NIDEC COMPONENTS Pressure Sensor Business Milestone
  • Sano Plant satellite-photo
  • Sano R&D center

Die Basis dieses Geschäfts wird das Sano-Werk in der Präfektur Tochigi, Japan. Wir handhaben alles von Sensorchips bis hin zu fertigen Drucksensorprodukten und haben sich heute zu einem führenden Geschäft unseres Unternehmens entwickelt.

 

2. Reichhaltige Standard-Aufstellung

 

 

 
 
Pressure sensor products
Wir bieten eine Vielzahl von Drucksensor Produkten mit unterschiedlichen Produkttypen an, wie Modultypen, Einbauverstärkertypen, Druckschalter, die die Kontakte von druckempfindlichen Elementen durch Anlegen eines bestimmten Druckwerts öffnen und schließen, und Manometer mit Anzeige Funktion. Wir haben eine große Auswahl. Die Arten von Drucksensorelementen sind der Halbleiter Si-MEMS und der Dünnschichtsensor mit SUS. Darunter gibt es zwei Arten von Si-MEMS-Verfahren; einer ist ein Silizium-Einkristalltyp, der für nicht korrosive Gase als Medium bestimmt ist, und der andere ist ein Dual-Zwerchfell-Strukturtyp, bei dem eine SUS-Zwerchfell im benetzten Teil platziert ist, die auch für Flüssigkeiten als Medium verwendet werden kann. Jedes dieser Sensorelemente setzen wir passend zur Anwendung und Umgebung ein und entwickeln daraus verschiedene Endprodukte.
Sensor
methode
Si-MEMS (Si Einkristalle)Si-MEMS (Dual Zwerchfell) SUS-Zwerchfell
mit Dünne-Schichten-Sensor
Struktur
Si-Einkristallelement wird durch anodisches Bonden über im Glas enthaltene Na-Ionen mit dem Glasboden verbunden. Das Si-Einkristallelement nimmt das Medium direkt auf. Eine SUS-Zwerchfell wird mittels Laserschweißen mit dem Gehäuse verbunden und überträgt über das Silikonöl Druck auf den Silikon-Sensorchip. Ein Dünnfilmmeßgerät wird mittels Dampfabscheidung auf einer SUS-Zwerchfelln über einen Isolierfilm gebildet.
Medien Nicht korrosive Gase Gase oder Flüssigkeiten, die das SUS-Material im medienberührten Teil nicht angreifen Gase oder Flüssigkeiten, die das SUS-Material im medienberührten Teil nicht angreifen
Features
  • • Although the characteristics change depending on the temperature,
    these models exhibit high reproductivity under certain temperatures.
  • • Capable of receiving high pressure and outputting high voltage at a high accuracy (approx. 100 mV at rated pressure of 100 kPa)
  • • Free from mechanical movable part, a long service life can be achieved
  • • With a high mass productivity, manufacturing at a lower cost is achieved.
  • • Suitable for vacuum, high and low temperature applications
  • • Exhibits less temperature-dependent characteristic change
  • • Single-model mass-production leads to manufacturing at a lower cost
  • • Compatible with electrolytic polishing

Unsere Drucksensor-Serien Line-up

Pressure
transducer
(Module)

P-2000, P-3000S P-8300, P-8305, P-8505

Pressure
transducer
with Amp.

PA-20, PA-100, PA-500 P-7100, PA-750/758, PA-800, PA-830/838, PA-838-D, PA-850/858, PA-860/868
High vacuum: PA-920S/928S
High temperature: PA-930/930-A
Pressure switch PS20, PS30, PS40, PS6, PS60 PS8, PS83, PS85, PS86 High vacuum: PS91, PAS91
  • Pressure gauge
  • Handheld digital manometer
PG-30, PG-200,PG-100N PG-35, PG-75, PG-208, PG-100B High vacuum: PG-20, PG-35L
High pressure: PG-35H
*In addition, we have a standard lineup of two series of pressure indicators, PZ-30 and PZ-200.

In recent years, we've been aggressively releasing new products such as types with a built-in small amplifier with ratiometric output and types for high vacuum and high temperature using SUS diaphragm with thin film elements, and we are expanding our business domain.

 
  • Kapitel 3
  • Stärken unseres Drucksensors
 

 

 
 

1. Integrierte Inhouse-Produktion

 

 

 
 

We manufacture in-house from sensor elements by making full use of semiconductor technology, and further develop and manufacture pressure sensor final products through processes such as mounting, temperature compensation, electronic circuit addition and casing, etc.


  • Silikonwafer ⇒ Sensor chip

  • Pressure sensor module

  • Pressure sensor products
    with amp.

A major feature of our pressure sensor is that we handle everything from development design to sensor element manufacturing process and product assembly process / calibration under the integrated quality control of our pressure sensor business based on high-mix low-volume production. Our strength lies in this business structure, which is capable of responding to special specifications and various customer needs in detail.

 

2. Sonderprodukte (Benutzerdefiniert-Support)

 

 

 
 
― Policy for custom support ―
In our pressure sensor business, while enhancing the standard product lineup mentioned above, we've been actively responding to custom support and joint development according to individual requests from the market and customers, with the following customer-first policy.

Our policy for customizations is as follows:

  1. If we can apply our existing products / technologies and judge that they can be commercialized in consideration of business feasibility, we will actively accept custom support.
  2. Even if the technology we have is scarce at the time of your request, we will consider it positively if we judge that joint development is possible.
  3. We will proactively propose the products and services that our customers need by collecting information by industry unique to us.

Our pressure sensors have a total of 92 models, and the P/N of models is 1,992. Of these, Customizations, so-called Special products, accounts for nearly 80% of the total on a monetary basis, and as the results show, we have provided many custom products and services that meet the individual needs of the market and customers. Introduce some examples of the special products bellow.

 

Customization examples

Electrolytic polishing + Degreasing + Clean packaging
Electrolitic polishing / Degreasing / clean packaging are often required as essential for in-line piping applications in semiconductor manufacturing equipment. First, in "Electrolitic polishing", the flatness is improved by chemical polishing so that impurities do not remain in the pressure receiving part. In addition, "Degreasing" prevents contamination by cleaning the organic matter in the pressure receiving part. Similarly, "Clean packaging" prevents contamination from the outside and guarantees the clean condition of the pressure sensor product until it is used by the customer.
 
PA-750/758 series: Compatible with cable connectors and Direct cable from body
  • Standard model
  • (1) Cable with connectors
  • (2) Direct cable from body

The PA-750/758 standard series uses a connector cable that the body and cable can be attached and detached, and the cable tip has a lead wire. We have both achievements in supporting (1) the installation of designated tip connectors and (2) direct cable removal from the main unit.

 
PS20 series: Special fitting

  • Standard model

  • Special fitting

The PS20 standard series is M5 male screw or block M5 female screw, but we have made a proposal to meet the market needs to extend the tip of the block, make an hole for M5 female screw, and fix it with a mounting screw.

 
Other examples
Specification / Performance change
Pressure range / Pressure unit Pressure range: Provision of range other than that in standard products, change of standard pressure unit (e.g. PSI, etc.)
Performance Accuracy enhancement (e.g. output calibration error, improvement of temperature characteristic, improvement of pressure resistance, etc.)
Output Analog output value, support for I2C/SPI, and others
Power voltage Change to desired power voltage
Ambient temperature Change to specification suitable for desired ambient temperature
Switch setting Shipment with a desired pressure threshold setting
Zero adjustment Addition of zero adjustment setting
Appearance / shape change
Fitting Shape, size, material, etc.
Cable                         Length, lead wire diameter, connector processing, terminal processing, tag attachment, etc.      
OEM design Name plate, panel design, casing color, etc.
Others
Custom development   Manufacturing of circuit board, unit design, custom-made shape, etc.              
 

With our experience and expertise, we will propose the best products and services that meet your needs. Please feel free to contact us from the button below.

 
 
  • Chapter 4
  • Pressure sensors FAQ
 
 

 

 
 
1. About Products
1. About cable specifications
Q. We want to fit a connector to a cable. Where can we find your cable specs? Answer
2. Scope of non-corrosive gases in medium
Q. You require that a pressure medium for use with P-2000 or P-3000S should be a non-corrosive gas. Can steam-laden air be used? If not, what model do you recommend? Answer
3. How to clear noises (Wiring shield cable)
Q. The transducer we use has a built-in amplifier. Its output fluctuates, and the cause seems to be noise. The side for mounting to the equipment is insulated. The shielding wires on the receiver side are not connected to anywhere during use. What measures should be implemented? Answer
4. How to set switch of pressure switch
Q. We intend to use a KF25 flange fitting for a PS91 vacuum switch for atmospheric pressure monitoring to detect when a vacuum heating oven is under atmospheric pressure. We are not sure how to select N1 and N2 and would like your advice. We imagine that the vacuum switch turns on when the pressure returns from vacuum to atmospheric pressure. How should the switch output be selected and set so that the vacuum switch turns on at -80 kPa when the pressure goes from atmospheric pressure to a vacuum? Answer
5. Mounting on PCB (Manual soldering required)
Q. We want to solder a P-2000 onto a printed circuit board. What are your recommended soldering conditions? Answer
6. Recommended fittings for M5 female screws connecting tubes
Q. We want to connect a pressure sensor to its tube using an M5 female screw. What attachment do you recommend? Answer
7. Recommended tubes for quick fittings
Q. What tubes do you recommend for use with the quick fittings? Answer
8. How to installate to piping (Tightening torque)
Q. What tightening torques do you recommend for tapered screw types? Answer
9. Effect of vertical to horizontal installation position
Q. The dual-diaphragm pressure sensor we use varies in output depending on whether the pressure port is turned downward or sideways. Does this mean the sensor is out of order? Answer
10. Stability after power applied
Q. According to the Common Notes, a warm-up time of about 10 minutes after power-on allows more accurate measurement. How much does the output voltage [V] fluctuate during the 10 minutes after power-on? We also want to know whether the output voltage changes linearly or not. Answer
11. Products selection suitable for using high vacuum
Q. Introduced PA-850-102A-NR2 to monitor the pressure inside the vacuum chamber. Our process requires pressure reduction to an absolute pressure of approx. 0 kPa. The brochure specifies a lower limit of operating vacuum of 1.3 kPa abs. Why is it unusable beyond this value? Recommend pressure sensors usable beyond the value. Answer
12. About operating temperature range of medium
Q. What is the liquid temperature range applicable to the PG-35? Although we are currently using room-temperature water, we want to use heated water and hence have to know the liquid temperature range. Answer
13. Effect of accuracies by ambient temperature
Q. How come the PG-100B has two different system accuracies, one being ±0.5%F.S. ±2 digits and the other being ±1.0%F.S. ±2 digits? Besides, what does "±2 digits" mean? Answer
14. Rated pressure range / Max. pressure / Break pressure
Q. What does the rated pressure range and maximum pressure in the specification mean? Will the sensor be broken if the burst pressure value is exceeded? Answer
15. How to purchase lithium batteries for PG-100
Q. The replacement battery specified for the PG-100 manometer is a lithium battery 3.6 VDC. The battery originally supplied with the PG-100 is one manufactured by Toshiba and bearing the model number ER6VM/3.6, which cannot be found on Toshiba's website, although ER6V P3.6 is found there.
Is it OK to use the latter instead?
Answer
16. Product lineup in accordance with UL991
Q. We are considering using a pressure sensor for a semiconductor manufacturing machine. Are UL991-compliant ones available from you? Answer
17. How to solve E2 ERRORs in pressure gauges
Q. We restarted a PG-75 for the first time after long-term non-use. Its zero adjustment resulted in an "E2 Error" message. How should this be dealt with? Answer
18. Effects of the use of not specified power supplies
Q. According to its specifications, the P-3000S is driven with a standard constant current of 1.5mA. Is there any problem when it is driven with a constant voltage of 5 V? Besides, what will become of the accuracy of linearity and that of the temperature characteristics when a 1mA current is set for a constant current drive? Answer
19. How to solve Zero Point ERRORs in pressure gauges
Q. The PG-100 handy manometer we use reads "-00.3" at power-on. The normal reading should be either "00.0" or "00.1." Is our PG-100 out of order? Answer
20. Batteries replacement notice of Manometers
Q. Is it normal that the reading by the PG-100 manometer appears thin when its battery is running low? Does a dying battery result in a reading lower than the actual pressure? Is there any method we can check with as the reference for the time to replace the battery? Answer
21. About elements and materials of pressure sensors
Q. We have adopted the PG-35 pressure gauge as the atmospheric pressure detector for the vacuum equipment we manufacture. The specifications for the equipment of an end-user who has placed an inquiry for our vacuum equipment require that the atmospheric pressure sensor to be used shall be a semiconductor sensor with a diaphragm made of stainless steel. Does the PG-35 meet this requirement? Answer
22. Manometers selection for organic solvent medium
Q. We want to use a PG-100-102A at hand to measure a fluid containing a diluted organic solvent. Is this possible? Answer
23. Use at high altitudes / Kind of pressure references
Q. We are considering using a PS6-102G-NAR in a location at an altitude of 1,000 [m]. Can it be used in this way? Answer
24. Out of Production
Q. What is the discontinuation information for the pressure sensor? Answer
25. How to operate the settings of Pressure gauge PG-30/PG-35?
Q. Can you tell me the panel settings and operation steps of the pressure gauge PG-35l purchased? Is there any explanatory material that beginners can understand? Answer
2. Documents and Certificates
26. How to obtain certificates of non-applicability
Q. We need a certificate of non-applicability to export a single product to a customer overseas. How can we obtain a certificate of non-applicability? Answer
27. How to get CAD data
Q. Can we get 2D/3D CAD data of your products? Answer
28. How to obtain declaration of CE conformity
Q. How can we get the declaration of CE conformity of your pressure sensor? Answer
29. How to obtain ISO9001 / 14001  certificates
Q. We understand you are an ISO 9001/14001 certified company. Can we obtain a copy of your certificate? Answer
30. About failure rates of products
Q. We want to know the failure rates of your products. Can we get the failure rate data from you? Answer
31. How to obtain RoHS3 compliant certificates
Q. Are your products compliant with RoHS Directive (EU) 2015/863? Answer
32. How to obtain UL certificates
Q. Our product is required to undergo a safety review, for which we need a UL certificate of your product. Can we obtain a copy of the UL certificate? Answer
3. Maintenance and Calibration
33. Models for calibratable services / How to obtain the certificates
Q. We are using a PG-100B. Do you provide calibration services for it? Answer
34. Investigation of faults / Repair / Replacement
Q. After power-on, the PG-100 reads "-1." The reading remains unchanged even under pressure. Do you have any idea what causes this? Can this be fixed? Answer

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